Microfabrication of freedom and articulated alumina-based components

• 1 September 2002
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 8  (6) , 368-374
• https://doi.org/10.1007/s00542-002-0192-8

Abstract

Keywords

• MECHANICAL PROPERTIES
• MICROFABRICATION
• ARTICULATED ALUMINA
• ALUMINA BASED
• MICRO OBJECTS
• BASED COMPONENTS
• DIMENSIONAL MICRO