Diagnostics of SF6 13.56MHz Discharge Using the Electrode System with Silicon Wafer.

• 1 January 1995
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 38  (3) , 139-142
• https://doi.org/10.3131/jvsj.38.139

Abstract

Keywords

• DIAGNOSTICS
• SILICON WAFER
• ELECTRODE SYSTEM
• SF6 13.56MHZ
• 13.56MHZ DISCHARGE
• DISCHARGE USING