Electrostatically excited and capacitively detected flexural plate waves on thin silicon nitride membranes with chemical sensor applications
- 31 March 1994
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 18 (1-3) , 103-106
- https://doi.org/10.1016/0925-4005(94)87066-7
Abstract
No abstract availableKeywords
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- Flexural plate-wave gravimetric chemical sensorSensors and Actuators A: Physical, 1990
- Fluid loading of a Lamb-wave sensorApplied Physics Letters, 1988