Critical Dimension Measurement in Nanometer Scale by Using Scanning Probe Microscopy
- 1 July 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (7R)
- https://doi.org/10.1143/jjap.35.4166
Abstract
This paper describes and demonstrates a new method using scanning probe microscopy for nanometer-order measurements of critical dimensions. The modeling equation, which includes the critical dimensions of both the sample and the probe, is derived from a mathematical relationship between the sample, probe, and image. The dimensions, which are the fitting parameters of the modeling equation, can be calculated from the height dependence of apparent width in SPM images. The feasibility of this method was confirmed by measuring several structures fabricated by nanofabrication.Keywords
This publication has 17 references indexed in Scilit:
- Envelope reconstruction of probe microscope imagesPublished by Elsevier ,2002
- Nano-scale fluctuations in electron beam resist pattern evaluated by atomic force microscopyMicroelectronic Engineering, 1996
- Si nanostructures fabricated by electron beam lithography combined with image reversal process using electron cyclotron resonance plasma oxidationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Fabrication of thickness-controlled silicon nanowires and their characteristicsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Energy Eigenvalues and Quantized Conductance Values of Electrons in Si Quantum Wires on \mb{100\mb} PlaneJapanese Journal of Applied Physics, 1995
- Metrology of Atomic Force Microscopy for Si Nano-StructuresJapanese Journal of Applied Physics, 1995
- Fabrication technique for Si single-electron transistoroperating at room temperatureElectronics Letters, 1995
- Measurement of Si wafer and SiO2 layer microroughness by large sample atomic force microscopeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Reconstruction of STM and AFM images distorted by finite-size tipsSurface Science, 1991
- An algorithm for surface reconstruction in scanning tunneling microscopySurface Science, 1987