XPS characterization of ultrafine Si3N4 powders
- 1 July 1988
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 12 (10) , 527-530
- https://doi.org/10.1002/sia.740121004
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- ESCA study of amorphous CVD Si3N4-C compositesJournal of Materials Science Letters, 1983
- Auger and photoelectron line energy relationships in aluminum–oxygen and silicon–oxygen compoundsJournal of Vacuum Science and Technology, 1982
- AES and XPS of silicon nitride films of varying refractive indicesJournal of Vacuum Science and Technology, 1978
- Surface Oxidation of Silicon Nitride FilmsJournal of the Electrochemical Society, 1976