Anisotropic Nd-Fe-B sputtered thin film magnets.
- 1 January 1991
- journal article
- Published by The Magnetics Society of Japan in Journal of the Magnetics Society of Japan
- Vol. 15 (2) , 241-244
- https://doi.org/10.3379/jmsjmag.15.241
Abstract
Sputtering conditions for synthesis of anisotropic Nd-Fe-B thin film magnets were studied. Results show that the film composition as well as substrate temperature are important parameters in affecting the c-axis orientation of the Nd-Fe-B tetragonal compounds. It was shown that the anisotropic thin film magnet with the easy axis of magnetization normal to the film plane could be deposited by choosing the composition near Nd13Fe70B17 at substrate temperatures as low as 460°C which is fairly below the previously reported value. The anisotropic thin film magnet exhibited the intrinsic coercivity of 7 kOe and the maximum energy products of 20 MGOe. The potential application of thin film magnets to microactuators and motors was demonstrated by fabrication and operation of 5mm diameter pulse motor using the obtained anisotropic thin film magnet.Keywords
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