Microstructure control for sputter-deposited ZrO2, ZrO2·CaO and ZrO2·Y2O3
- 1 August 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 94 (1) , 31-45
- https://doi.org/10.1016/0040-6090(82)90027-x
Abstract
No abstract availableKeywords
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