Evaluation of the Electron Cyclotron Resonance Plasma Process Using a Microwave Twin-Lead Line Probe
- 1 October 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (10A) , L1767
- https://doi.org/10.1143/jjap.30.l1767
Abstract
A plasma measurement method using a parallel twin-lead line probe is developed. An accurate measurement of process plasma such as electron cyclotron resonance plasma can be made even in the presence of an external magnetic field by this method. Measurement errors are estimated to be less than ±10% considering the influence of the electron density distribution and the multiple reflection between the plasma boundaries. The density of electron cyclotron resonance plasma is measured by the method and a high ionization degree of 1 to 10% is confirmed.Keywords
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