Line-Edge Roughness: Characterization and Material Origin

• 30 June 2003
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 42  (Part 1, No) , 3755-3762
• https://doi.org/10.1143/jjap.42.3755

Abstract

Keywords

• CHARACTERIZATION AND MATERIAL
• MATERIAL ORIGIN
• EDGE ROUGHNESS
• LINE EDGE