Evaporation of High Quality In2 O 3 Films from In2 O 3 / In Source—Evaporation Chemistry and Thermodynamics
- 1 September 1981
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 128 (9) , 1953-1957
- https://doi.org/10.1149/1.2127773