Novel single mirror condenser for x-ray lithography beam lines

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 4018-4023
• https://doi.org/10.1116/1.587422

Abstract

Keywords

• NOVEL SINGLE
• SINGLE MIRROR
• MIRROR CONDENSER
• RAY LITHOGRAPHY
• LITHOGRAPHY BEAM
• BEAM LINES