Few Characteristics of Epitaxial GaN—Etching and Thermal Decomposition

• 1 January 1974
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 121  (10) , 1383
• https://doi.org/10.1149/1.2401694

Abstract

Keywords

• THERMAL DECOMPOSITION
• EPITAXIAL GAN
• ETCHING AND THERMAL
• CHARACTERISTICS OF EPITAXIAL