Silicon Epitaxial Layers with Abrupt Interface Impurity Profiles

• 1 January 1969
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 116  (11) , 1561
• https://doi.org/10.1149/1.2411607

Abstract

Keywords

• SILICON EPITAXIAL
• EPITAXIAL LAYERS
• ABRUPT INTERFACE
• INTERFACE IMPURITY PROFILES