Stress gradient and structural properties of atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensors
- 1 October 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 51 (1) , 9-12
- https://doi.org/10.1016/0924-4247(96)80043-4
Abstract
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