Visible vs. Near Infrared Ellipsometry for the Investigation of Amorphous Silicon Films Produced by Ion Implantation
- 1 July 1987
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 134 (7) , 1794-1798
- https://doi.org/10.1149/1.2100759
Abstract
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