Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 24 (1) , 109-110
- https://doi.org/10.1109/27.491736
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography techniqueJournal of Vacuum Science & Technology A, 1992