CMOS-compatible high efficiency double-etched apodized waveguide grating coupler
- 25 March 2013
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 21 (7) , 7868-7874
- https://doi.org/10.1364/oe.21.007868
Abstract
We present a high efficiency double-etched apodized fiber-to-waveguide grating coupler on a silicon-on-insulator substrate, which can be fabricated using deep UV photolithography. The fabricated grating coupler yields a coupling loss of −1.5 dB with 3-dB bandwidth of 54 nm at a wavelength of 1560 nm. Measurements and simulations show that the double-etched apodized grating coupler design is robust and tolerant to fabrication process variations.Keywords
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