An activation process for increased sensitivity of a SAW gas microsensor
- 4 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Optimization of a SAW metal oxide semiconductor gas sensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Macroscopic theory of surface acoustic wave gas microsensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Hydrogen Sulfide Surface Acoustic Wave Gas DetectorIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987