High performance submicron SOI devices with silicon film thickness below 50 nm

Publisher Website

17 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/soi.1994.514232

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

High performance ultrathin SOI MOSFET's obtained by localized oxidation
IEEE Electron Device Letters, 1994