Some aspects concerning design for e-beam testability
- 31 December 1986
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 5 (1-4) , 515-522
- https://doi.org/10.1016/0167-9317(86)90085-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Shot noise limits to measurement accuracy and bandwidth in electron-beam testingJournal of Vacuum Science & Technology B, 1986
- Local field effects on voltage contrast in the scanning electron microscopeJournal of Physics D: Applied Physics, 1981
- Estimate of minimum measurable voltage in the SEMJournal of Physics E: Scientific Instruments, 1977