Energy and Mass Analyses of Secondary Positive Ions from Silicon Wafer Surfaces

• 1 January 1978
• journal article
• Published by The Mass Spectrometry Society of Japan in Journal of the Mass Spectrometry Society of Japan
• Vol. 26  (1) , 89-95
• https://doi.org/10.5702/massspec1953.26.89

Abstract

Keywords

• SILICON WAFER
• MASS ANALYSES
• SECONDARY POSITIVE
• WAFER SURFACES
• POSITIVE IONS
• ENERGY AND MASS