Some important developments in capture pumping technology in the last 40 years

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (4) , 915-920
• https://doi.org/10.1116/1.579068

Abstract

Keywords

• PUMPING TECHNOLOGY
• CAPTURE PUMPING
• LAST
• YEARS
• IMPORTANT DEVELOPMENTS