A planar integrated chlorinated hydrocarbon gas sensor on a silicon substrate
- 31 August 1991
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 5 (1-4) , 199-203
- https://doi.org/10.1016/0925-4005(91)80247-h
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- MOS-Type Micro-Oxygen Sensor Using LaF3 Workable at Room TemperatureJapanese Journal of Applied Physics, 1990
- Gas sensor and permeation apparatus for the determination of chlorinated hydrocarbons in waterAnalytical Chemistry, 1990
- Microfabricated amperometric gas sensorsIEEE Transactions on Electron Devices, 1988
- Optimization of the Hydrazine‐Water Solution for Anisotropic Etching of Silicon in Integrated Circuit TechnologyJournal of the Electrochemical Society, 1975