Investigation of nanotribological and nanomechanical properties of the digital micromirror device by atomic force microscopy
- 1 July 2004
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 22 (4) , 1388-1396
- https://doi.org/10.1116/1.1743050
Abstract
No abstract availableKeywords
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