Operational testing of L.S.I. arrays by stroboscopic scanning electron microscopy
- 1 October 1971
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 10 (5) , 317-318
- https://doi.org/10.1016/0026-2714(71)90207-1
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Device failure analysis by scanning electron microscopyMicroelectronics Reliability, 1969
- PROBING OF GUNN EFFECT DOMAINS WITH A SCANNING ELECTRON MICROSCOPEApplied Physics Letters, 1968
- Stroboscopic scanning electron microscopyJournal of Physics E: Scientific Instruments, 1968
- Scanning Electron MicroscopyPublished by Elsevier ,1966