Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials

• 1 September 1994
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 173-174, 17-22
• https://doi.org/10.4028/www.scientific.net/msf.173-174.17

Abstract

Keywords

• DRY ETCHING
• FEMTOSECOND PULSE LASER
• LASER-ABLATION
• MICROSTRUCTURING
• MULTI-PHOTON ABSORPTION
• SEMICONDUCTOR
• SILICON
• SUBPICOSECOND-PULSE LASER