A new type of liquid helium specimen stage for an electron microscope

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Abstract
A liquid-helium temperature specimen stage has been constructed. It incorporates a quick specimen exchange mechanism and precession type specimen tilting mechanism, which has not previously been employed in a low temperature stage. The lowest attainable temperature at the illuminated specimen area is about 12 K, resolution is better than 12 AA, and the maximum tilting angle is 10 degrees . Low temperature electron microscopy with fairly high resolution becomes almost as routine as room temperature microscopy. The specimen stage can be easily changed into a heating stage by a simple replacement of a part.

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