Spin coating process of sol-gel silicate films deposition: Effect of spin speed and processing temperature
- 1 January 1995
- journal article
- research article
- Published by Springer Nature in Journal of Sol-Gel Science and Technology
- Vol. 5 (3) , 173-183
- https://doi.org/10.1007/bf00487014
Abstract
No abstract availableKeywords
This publication has 20 references indexed in Scilit:
- Sol-gel films for integrated circuitsJournal of Sol-Gel Science and Technology, 1994
- Sol-gel thin film formationJournal of Non-Crystalline Solids, 1990
- Spin coating: One-dimensional modelJournal of Applied Physics, 1989
- The mechanics of spin coating of polymer filmsPhysics of Fluids, 1988
- The factors affecting the thickness of sol-gel derived silica coatings prepared by dippingJournal of Non-Crystalline Solids, 1986
- Coating flow of non-Newtonian fluids on a flat rotating diskIndustrial & Engineering Chemistry Fundamentals, 1984
- A mathematical model for spin coating of polymer resistsJournal of Applied Physics, 1984
- Characteristics of resist films produced by spinningJournal of Applied Physics, 1978
- On the Flow of a Non-Newtonian Liquid on a Rotating DiskJournal of Applied Physics, 1960
- Flow of a Viscous Liquid on a Rotating DiskJournal of Applied Physics, 1958