Epitaxial Growth and Selectivity of Al x Ga1 − x As Using Novel Metalorganic Precursors
- 1 June 1991
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 138 (6) , 1817-1826
- https://doi.org/10.1149/1.2085879
Abstract
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