Demonstration of three-dimensional microstructure self-assembly

• 1 January 1995
• journal article
• Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
• Vol. 4  (4) , 170-176
• https://doi.org/10.1109/84.475543

Abstract

Keywords

• DIMENSIONAL MICROSTRUCTURE
• HINGE
• RECONFIGURING
• ASSEMBLY
• MICROSTRUCTURES USING
• FABRICATION
• TENSION