On structure and properties of sputtered Ti and Al based hard compound films

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 2695-2700
• https://doi.org/10.1116/1.573708

Abstract

Keywords

• LATTICE PARAMETER
• NITROGEN
• MAGNETRON SPUTTERING
• FACE CENTERED CUBIC
• CRYSTAL STRUCTURE
• TITANIUM