Non-specular X-ray scattering from thin films and multilayers with small-angle scattering equipment

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Abstract
We present measurements of non-specular X-ray scattering from rough interfaces at a dedicated small-angle scattering beamline that allows for very low divergence of the incident beam and therefore for high resolution close to the specularly reflected beam. A two-dimensional detector is used to measure the non-specular intensity both in and out of the plane of reflection. The method is exemplified by an Au single layer, an amorphous Nb/Al2O3 multilayer and an epitaxial GaAs/AlAs superlattice sample.