Imaging XPS—A new technique, I—principles

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Abstract
XPS imaging promises to be a powerful analytic tool because it enables specific information on both elements and bonding to be recorded on a two‐dimensional distribution map. As far as the authors are aware, the only scanning XPS method to date which has been found to be practical is essentially a scanned‐particle‐beam method, like scanning AES, and it is only applicable to thin film specimens. This paper provides the basic ideas of a new imaging XPS technique based on a quite different concept. It will be applicable to any kind of specimen that can be analysed in a conventional XPS system. It makes use of the dispersion properties of a spherical condenser‐type spectrometer and applies a two‐dimensional electron detection device for decoding the energy and emission position of an analysed photoelectron. Experimental arrangement and theory of operation are presented.

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