Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers

Abstract
We discuss laser fabrication of microstructures in photoetchable glass-ceramics, FOTURAN. A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating three-dimensional structures. Other aspects of the machining, such as the fluence and crystallization depth resulting from these two methods are presented. A detailed analysis of the absorption process of both lasers in FOTURAN is discussed.