Structure of Silicon Films Deposited on Oxidized Silicon Wafers

• 1 January 1970
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 117  (12) , 1569
• https://doi.org/10.1149/1.2407386

Abstract

Keywords

• SILICON FILMS
• FILMS DEPOSITED
• STRUCTURE
• OXIDIZED SILICON WAFERS
• DEPOSITED ON OXIDIZED