Kinetic energy influence of hyperthermal dual ion beams on bonding and optical properties of carbon nitride films
- 23 March 1998
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (12) , 1412-1414
- https://doi.org/10.1063/1.120580
Abstract
Carbon nitride films were produced by simultaneous irradiation of well-defined hyperthermal (50–400 eV), isotopically mass-separated and ions with various kinetic energy combinations. It was found that the intensity of CN-triple bonds normalized by the amount of nitrogen atoms in the films and the complex refraction index are correlated with the energy combination of and ions.
Keywords
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