A compact flange-mounted electron beam source

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Abstract
A compact rod-fed electron beam source is described which provides clean and controlled deposition of high-temperature materials at relatively low rates. The source is inexpensively fabricated as a flange-mounted, bolt-on accessory to a surface analysis or deposition chamber, requires only two commonly available power supplies to operate, and does not interfere with the use of surface electron spectroscopies during operation.

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