Method of fabrication of ISFETs and CHEMFETs on an Si-SiO2-Si structure
- 1 June 1993
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 14 (1-3) , 653-654
- https://doi.org/10.1016/0925-4005(93)85130-3
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- A pH-isfet and an integrated ph-pressure sensor with back-side contactsSensors and Actuators, 1988
- Methods of isfet fabricationSensors and Actuators, 1981