Energy distribution of ions and fast neutrals in microdischarges for display technology

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Abstract
In this work we present simple theoretical predictions as well as full Monte Carlo calculations of the energy distribution of the ion and fast neutral fluxes impinging on the materials that surround the microdischarges in plasma display panels and plasma addressed liquid crystal displays. We consider various rare gas ion species in different microdischarge designs. Often simple theoretical distribution functions are in good agreement with the results of Monte Carlo calculations. Under the influence of symmetric charge transfer collisions the ion energy distribution is essentially different from a Maxwellian distribution, and the ion motion is strongly orientated along the electric field. The flux of the fast neutrals formed by symmetric charge transfer is usually even larger than the ion flux itself.