The Raman microprobe: A quantitative analytical tool to characterize laser-processed semiconductors
- 1 January 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Circuits and Devices Magazine
- Vol. 2 (1) , 37-43
- https://doi.org/10.1109/MCD.1986.6311769
Abstract
The Raman microprobe technique can provide quantitative information on structure, composition, homogeneity, and stress, with 1-μm resolution. It is also a nondestructive technique that requires no special sample preparation and can be used in situ. After an introduction to Raman scattering and a description of the technique itself, the author reviews specific applications in the fields of laser recrystallization and laser damage of layered structures.Keywords
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