Sputter deposition of SiC coating on silicon wafers
- 1 September 1992
- journal article
- Published by Elsevier in Scripta Metallurgica et Materialia
- Vol. 27 (5) , 565-570
- https://doi.org/10.1016/0956-716x(92)90341-b
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Stress behaviour of magnetron-sputtered SiC thin films on thermal cycling and annealingThin Solid Films, 1991
- Crystallization behaviour of amorphous Si1-xCx films prepared by r.f. sputteringThin Solid Films, 1991
- The scratch test: Different critical load determination techniquesSurface and Coatings Technology, 1988
- Adhesion testing by the scratch test method: The influence of intrinsic and extrinsic parameters on the critical loadThin Solid Films, 1987