Probe Measurement for High Frequency Discharge III

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Abstract
A method to determine the electron temperature and the field strength of high frequency discharge plasmas is given. It is a modified floating double probe method, where the double probe consists of a rod probe and a forked probe. By this method argon discharges in the region between 0.26 and 1.0 mm Hg at 170 Mc/sec have been studied. The electron temperatures and the field strengths were measured as a function of the radius of discharge tubes and compared with theoretical equations. The obtained results were approximately equal to those of direct current discharge.