Recoil implantation of materials
- 1 April 1977
- journal article
- letter
- Published by Springer Nature in Journal of Materials Science
- Vol. 12 (4) , 829-831
- https://doi.org/10.1007/bf00548179
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Transmission sputtering and recoil implantation from thin metal films under ion bombardmentNuclear Instruments and Methods, 1972