Solid-state electron beam chemistry of mixtures of diazoketones in phenolic resins: AZ resists

• 1 July 1988
• journal article
• research article
• Published by American Chemical Society (ACS) in The Journal of Physical Chemistry
• Vol. 92  (15) , 4558-4565
• https://doi.org/10.1021/j100326a061

Abstract

Keywords

• ELECTRON BEAM