The influence of a glow discharge treatment on surface modification and outgassing rate of stainless steel and titanium alloys
- 1 April 1996
- Vol. 47 (4) , 383-390
- https://doi.org/10.1016/0042-207x(95)00255-3
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Reduction of pumping time for a sputtering system by glow discharge cleaningJournal of Vacuum Science & Technology A, 1991
- Reduction of outgassing from stainless surfaces by surface oxidationVacuum, 1990
- Glow discharge techniques for conditioning high-vacuum systemsJournal of Vacuum Science & Technology A, 1988
- Outgassing Characteristics of Stainless Steel and Aluminum with Different Surface TreatmentsJournal of Vacuum Science and Technology, 1969