New graphite liquid metal ion source geometry developed for corrosive metal. Application to an aluminium ion source
- 31 January 1996
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 30 (1-4) , 261-264
- https://doi.org/10.1016/0167-9317(95)00241-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Aluminum cluster ions generated by a liquid metal ion sourceJournal of Applied Physics, 1991
- Focused ion beam machining of mirror facets of a monolithically integrated GaAs/GaAlAs double heterojunction (DH) laser and its optical waveguide.Microelectronic Engineering, 1990
- The emission characteristics of an aluminum liquid metal ion sourceJournal of Applied Physics, 1982