SiC device technology: remaining issues
- 1 August 1997
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 6 (10) , 1400-1404
- https://doi.org/10.1016/s0925-9635(97)00118-0
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Al, Al/C and Al/Si implantations in 6H-SiCJournal of Electronic Materials, 1996
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