Unique hydride chemistry on silicon–PH3 interaction with Si(100)-(2×1)

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (6) , 2995-2998
• https://doi.org/10.1116/1.578927

Abstract

Keywords

• HIGH RESOLUTION
• HYDROGEN
• AUGER ELECTRON SPECTROSCOPY
• DECOMPOSITION
• ELECTRON SPECTROSCOPY
• TEMPERATURE
• CHEMISTRY
• DOPING
• DISSOCIATION
• RESOLUTION
• ELECTRONS
• INTERACTIONS
• ENERGY
• PHOSPHORUS
• DESORPTION
• ADSORPTION
• KINETICS
• SILICON
• SPECTROSCOPY
• SURFACES