Morphology control of thin LiCoO2 films fabricated using the electrostatic spray deposition (ESD) technique
- 1 January 1996
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Journal of Materials Chemistry
- Vol. 6 (5) , 765-771
- https://doi.org/10.1039/jm9960600765
Abstract
Electrostatic spray deposition (ESD) is a technique recently developed for the fabrication of inorganic thin films. Several process steps involved in an ESD process are overviewed. A variety of surface morphologies of LiCoO2 thin layers fabricated by this technique are presented, indicating correlations between the morphologies and deposition conditions.Keywords
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