Continuous-membrane surface-micromachined silicon deformable mirror
- 1 May 1997
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 36 (5) , 1354-1360
- https://doi.org/10.1117/1.601598
Abstract
The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mirror was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces. © 1997 Society of Photo-Optical Instrumentation Engineers.Keywords
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